| 기준거리(CD) | 60mm | Z축높이 | 33mm |
|---|---|---|---|
| Near | 34mm | Reference | 40mm |
| Remote(Far) | 49mm | Z축 반복도 | 0.3um |
| X축 반복도 | 4um | X축 데이터 간격 | 15um |
| Z축 Linearity | ±0.01%F.S | X축 Profile Point | 3200 |
| 스캔속도 | 1500~20000 | Brand | SRI7060 |
| Sort | FileName | Download |
|---|---|---|
| Catalog | SSZN_3D Laser Profiler-Product Brochure SRI.pdf | Download |
| FileName | Not attached | Completion |
| Datasheet | Not attached | Completion |